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Standardless Quantification of Conductive Oxides In The Sem

Published online by Cambridge University Press:  02 July 2020

J.M. Dijkstra  and
R.B Shen
J.M. Dijkstra
Affiliation:
ED AX International, P.O. Box 4144, NL-5004JC Tilburg, the Netherlands
R.B Shen
Affiliation:
EDAX Internationa, 85 Mckee Drive, Mahwah, NJ, 07430, U.S.A.
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Extract

In the last 10 years the development of new polymer type detector window materials has dramatically increased the opportunities for light element analysis with Energy Dispersive Spectrometers (EDS). With the introduction of light-element analysis the need also arises to accurately quantify X-ray spectra. Traditional quantification techniques, using a probe current measuring device and pure elemental standards, have been introduced into the field of EDS, but these techniques prevented much of the conveniences of the EDS techniques with respect to speed and ease of use. Many users are therefore willing to sacrifice part of the maximum achievable accuracy in return for a method that is more convenient: standardless analysis.

With EDS analysis the widely published ZAF and φ(ρz) models can be used to convert relative intensities into weight percentages, but for standardless analysis the inaccuracy of the result is mainly caused by the reference intensities.

Type
Quantitative Biological and Materials Microanalysis by Electrons and X-Rays
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 899 - 900
Copyright
Copyright © Microscopy Society of America 1997

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References

Pouchou, J.-L., Mikrochim. Acta, 114/115 (1994), 33.10.1007/BF01244532CrossRefGoogle Scholar
based on Myklebust, R.L., Fiori, C.E. and Heinrich, K.F.J., NBS techn. note 1106 (1979), 116.Google Scholar
based on Bastin, G.F. and Heijligers, H.J.M. in Electron Probe Quantitation, Ed. Heinrich, K.F.J. & Newbury, D.E., (1991), 145.10.1007/978-1-4899-2617-3_8CrossRefGoogle Scholar
based on Duncomb, P., Mikrochim. Acta, 114/115 (1994), 3.10.1007/BF01244530Google Scholar
The authors gratefully acknowledge the assistance of Dr. G.F. Bastin and Ir. H.J.M. Heijligers of the Eindhoven University of Technology in providing the analysis samples.Google Scholar