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The Sputtering Behavior of Polymeric Materials During Focused Ion Beam Nanomachining

Published online by Cambridge University Press:  01 August 2010

KC Wong ,
AD Batchelor ,
CM Balik  and
DP Griffis
KC Wong
Affiliation:
North Carolina State University
AD Batchelor
Affiliation:
North Carolina State University
CM Balik
Affiliation:
North Carolina State University
DP Griffis
Affiliation:
North Carolina State University

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 206 - 207
Copyright
Copyright © Microscopy Society of America 2010