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Spectrum Imaging: Microanalysis for a New Millennium

Published online by Cambridge University Press:  02 July 2020

I.M. Anderson
I.M. Anderson*
Affiliation:
Metals & Ceramics Division, Oak Ridge National Laboratory, MS-6376, PO Box 2008, Oak Ridge, TN37831-6376
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Extract

Spectrum imaging, where a full spectrum is acquired at each pixel in a two-dimensional array, provides a new paradigm for materials characterization that combines the advantages of traditional paradigms for imaging and analysis in electron optical characterization. Traditionally, electron optical imaging (e.g., secondary electron imaging of electron-opaque or bright-field imaging of electron-transparent specimens) emphasizes contrast production among distinct features of the microstructure. An excellent survey of the specimen microstructure is achieved - many pixels are acquired - but typically no quantitative analysis of image intensities is performed. In contrast, electron optical analysis techniques traditionally concentrate on quantitative elemental analysis (e.g., electron probe microanalysis), or at least comprehensive qualitative analysis through full spectrum acquisition (e.g., energy-dispersive X-ray or electron energy-loss spectrometry). However, these analyses are typically performed at only a few locations on the specimen, which are pre-selected on the basis of the image contrast generated as described above.

Type
Spectrum Imaging: Applications and Methods of Analysis
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 1048 - 1049
Copyright
Copyright © Microscopy Society of America

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7. Research at the Oak Ridge National Laboratory SHaRE User Facility was sponsored by the Division of Materials Sciences and Engineering, U.S. Department of Energy, under contract DE-AC05-96OR22464 with Lockheed Martin Energy Research Corporation.Google Scholar