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Spatial Distribution of the Electron Dose and the Effects on Beam Damage in STEM

Published online by Cambridge University Press:  22 July 2022

Daniel Nicholls ,
Mounib Bahri ,
B. Layla Mehdi  and
Nigel D. Browning
Daniel Nicholls*
Affiliation:
Department of Mechanical, Materials and Aerospace Engineering, University of Liverpool, Liverpool, L69 3GH, United Kingdom
Mounib Bahri
Affiliation:
Department of Mechanical, Materials and Aerospace Engineering, University of Liverpool, Liverpool, L69 3GH, United Kingdom
B. Layla Mehdi
Affiliation:
Department of Mechanical, Materials and Aerospace Engineering, University of Liverpool, Liverpool, L69 3GH, United Kingdom Physical and Computational Science Directorate, Pacific Northwest National Laboratory, Richland, WA 99352, USA The Faraday Institution, Quad One, Harwell Science and Innovation Campus, Didcot OX11 0RA, United Kingdom
Nigel D. Browning
Affiliation:
Department of Mechanical, Materials and Aerospace Engineering, University of Liverpool, Liverpool, L69 3GH, United Kingdom Physical and Computational Science Directorate, Pacific Northwest National Laboratory, Richland, WA 99352, USA The Faraday Institution, Quad One, Harwell Science and Innovation Campus, Didcot OX11 0RA, United Kingdom Sivananthan Laboratories, 590 Territorial Drive, Bolingbrook, IL 60440. USA
*
*Corresponding author: [email protected]

Abstract

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Type
Electron Microscopy of Beam Sensitive Samples: The Trials and Tribulations of Electron-beam Sample Interactions
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 2138 - 2140
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Copyright
Copyright © Microscopy Society of America 2022

References

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