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Spatial Distribution Maps for Atom Probe Tomography

Published online by Cambridge University Press:  14 November 2007

Brian P. Geiser
Affiliation:
Imago Scientific Instruments Corporation, 5500 Nobel Drive, Madison, Wisconsin 53711-4951, USA
Thomas F. Kelly
Affiliation:
Imago Scientific Instruments Corporation, 5500 Nobel Drive, Madison, Wisconsin 53711-4951, USA
David J. Larson
Affiliation:
Imago Scientific Instruments Corporation, 5500 Nobel Drive, Madison, Wisconsin 53711-4951, USA
Jason Schneir
Affiliation:
Imago Scientific Instruments Corporation, 5500 Nobel Drive, Madison, Wisconsin 53711-4951, USA
Jay P. Roberts
Affiliation:
Imago Scientific Instruments Corporation, 5500 Nobel Drive, Madison, Wisconsin 53711-4951, USA
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Abstract

A real-space technique for finding structural information in atom probe tomographs, spatial distribution maps (SDM), is described. The mechanics of the technique are explained, and it is then applied to some test cases. Many applications of SDM in atom probe tomography are illustrated with examples including finding crystal lattices, correcting lattice strains in reconstructed images, quantifying trajectory aberrations, quantifying spatial resolution, quantifying chemical ordering, dark-field imaging, determining orientation relationships, extracting radial distribution functions, and measuring ion detection efficiency.

Type
Research Article
Copyright
© 2007 Microscopy Society of America

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References

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