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Solid State Backscattered Electron Detector Optimized for Minimum Detectable Energy and Maximum Scan Speed

Published online by Cambridge University Press:  08 April 2017

A Liebel ,
H Soltau ,
R Eckhardt ,
O Jaritschin ,
A Niculae  and
F Schopper
A Liebel
Affiliation:
PNSensor GmbH
H Soltau
Affiliation:
PNSensor GmbH
R Eckhardt
Affiliation:
PNSensor GmbH
O Jaritschin
Affiliation:
PNDetector GmbH
A Niculae
Affiliation:
PNDetector GmbH
F Schopper
Affiliation:
MPI Halbleiterlabor

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 904 - 905
Copyright
Copyright © Microscopy Society of America 2011