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Site-Specific Lift-Out on Complicated Nanoscale Structures

Published online by Cambridge University Press:  22 July 2022

Yimeng Chen*
Affiliation:
CAMECA Instruments Inc., Madison, WI 53711 USA
Ty J. Prosa
Affiliation:
CAMECA Instruments Inc., Madison, WI 53711 USA
*
*Corresponding author: [email protected]

Abstract

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Type
On Demand - Advances in Focused Ion Beam Instrumentation, Applications and Techniques in Materials and Life Sciences
Copyright
Copyright © Microscopy Society of America 2022

References

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