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SiO2 Adlayers on Si with a Low Energy Enhancing X-ray Optic

Published online by Cambridge University Press:  03 August 2008

E Lochner
Affiliation:
Parallax Research, Inc
G Brown
Affiliation:
Parallax Research, Inc
D OHara
Affiliation:
Parallax Research, Inc
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Copyright
© 2008 Microscopy Society of America

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