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Simulation for the Development of Electron Guns and Detection Systems of Modern Field Emission Scanning Electron Microscopes

Published online by Cambridge University Press:  28 September 2015

Yoichi Ose ,
Hirofumi Sato ,
Hideo Morishita  and
Teruo Kohashi
Yoichi Ose
Affiliation:
Hitachi High-Technologies Corp., 882, Ichige, Hitachinaka, Ibaraki 312-8504, Japan.
Hirofumi Sato
Affiliation:
Hitachi High-Technologies Corp., 882, Ichige, Hitachinaka, Ibaraki 312-8504, Japan.
Hideo Morishita
Affiliation:
Hitachi Ltd., Central Research Lab., 1-280, Higashi-Koigakubo, Kokubunji, Tokyo, Japan.
Teruo Kohashi
Affiliation:
Hitachi Ltd., Central Research Lab., 1-280, Higashi-Koigakubo, Kokubunji, Tokyo, Japan.

Abstract

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Type
Numerical Methods
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 200 - 205
Copyright
Copyright © Microscopy Society of America 2015 

References

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