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SIMS on the Helium Ion Microscope: a Powerful Tool for High-Resolution High-Sensitivity Nano-Analytics

Published online by Cambridge University Press:  25 July 2016

Tom Wirtz ,
David Dowsett ,
Jean-Nicolas Audinot  and
Santhana Eswara
Tom Wirtz
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology (LIST), 41 rue du Brill, L-4422 Belvaux, Luxembourg
David Dowsett
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology (LIST), 41 rue du Brill, L-4422 Belvaux, Luxembourg
Jean-Nicolas Audinot
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology (LIST), 41 rue du Brill, L-4422 Belvaux, Luxembourg
Santhana Eswara
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology (LIST), 41 rue du Brill, L-4422 Belvaux, Luxembourg

Abstract

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Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 160 - 161
Copyright
© Microscopy Society of America 2016 

References

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