Hostname: page-component-cd9895bd7-dk4vv Total loading time: 0 Render date: 2024-12-27T11:12:41.398Z Has data issue: false hasContentIssue false
  • English
  • Français

SEM Specimen Preparation by Broad Ion Beam Etching For Enhanced Channeling and Orientation Imaging

Published online by Cambridge University Press:  02 July 2020

R. Alani ,
D. P. Field  and
K. Ogura
R. Alani
Affiliation:
Gatan R&D, 5933 Coronado Lane, Pleasanton, CA94588, USA
D. P. Field
Affiliation:
TSL Inc., 226 West 2230 North #120, Provo, Utah, 84604, USA
K. Ogura
Affiliation:
JEOL Ltd. 1-2 Musasino 3-Chome Akishima, Tokyo196, JAPAN
Get access

Extract

It is well known that the “channeling contrast” and EBSD pattern formation, which is the basis for “orientation imaging microscopy” (OIM), is highly sensitive to specimen surface quality in SEM studies. Typically, specimens for these studies are prepared by a combination of mechanical grinding then chemical etching or electropolishing. As an alternative to the chemical step(s) in this technique, we report a method based upon broad ion beam etching equipment [1]. This alternative method is more universal and reliable for enhanced channeling contrast and EBSD/OIM of metallic materials.

A variety of polycrystalline metallic specimens were etched in an instrument dedicated for etching and coating SEM specimens [1] and examined in the SEM for channeling contrast and OIM mapping. Fig. la is a SEM image of an annealed titanium sheet specimen in as-received condition showing a well-defined surface texture. It can be seen that channeling contrast is absent, presumably due to the existence of a surface layer formed during the manufacturing process.

Type
Precision Specimen Preparation
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 910 - 911
Copyright
Copyright © Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1Alani, R., Mitro, R.J., Tabatt, C.M. and Malaszewski, L., in Proc. 55th. Ann. Meeting of MSA, p. 363,(1997)Google Scholar
2)Wright, S.I., J. Computer Assisted Microscopy, 5, p. 209, (1993).Google Scholar