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Selective Detection of Secondary Electrons in an SEM using a Multi-Channel Detector

Published online by Cambridge University Press:  30 July 2020

Yasuhiro Shirasaki  and
Momoyo Enyama
Yasuhiro Shirasaki
Affiliation:
Hitachi, Ltd., Kokubunji-shi, Tokyo, Japan
Momoyo Enyama
Affiliation:
Hitachi, Ltd., Kokubunji-shi, Tokyo, Japan

Abstract

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Type
Advances in Electron Microscopy to Characterize Materials Embedded in Devices
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 392 - 393
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Copyright
Copyright © Microscopy Society of America 2020

References

Otsuka, et al. , Journal Name 12., 279 (2014).Google Scholar
Suzuki, et al. , Proc. Of SPIE 10145, 101451L-1 (2017).Google Scholar