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Selective Detection of Backscattered Electrons in the Compound Lens Equipped UHR SEM

Published online by Cambridge University Press:  25 July 2016

Petr Wandrol ,
Radovan Vašina ,
Adrian Sandu ,
Ernst Jan Vesseur  and
Lubomir Tůma
Petr Wandrol
Affiliation:
FEI Company, Brno, Czech Republic
Radovan Vašina
Affiliation:
FEI Company, Brno, Czech Republic
Adrian Sandu
Affiliation:
FEI Company, Eindhoven, the Netherlands
Ernst Jan Vesseur
Affiliation:
FEI Company, Eindhoven, the Netherlands
Lubomir Tůma
Affiliation:
FEI Company, Brno, Czech Republic

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 576 - 577
Copyright
© Microscopy Society of America 2016 

References

References:

[1] PdCeO2 sample courtesy of Dr. Alessandro Lavacchi, CNR ICCOM.Google Scholar
[2] Ag particles on polymer sample courtesy of the TE01020218 project team, Membrain.Google Scholar
[3] The authors acknowledge funding from the Technology Agency of the Czech Republic, TE01020118.Google Scholar