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Role of the Angular Distribution of Backscattered Electrons in Low Energy Scanning Electron Microscope

Published online by Cambridge University Press:  01 August 2018

Ilona Mullerova ,
Ludek Frank ,
Ivo Konvalina  and
Eliska Mikmekova
Ilona Mullerova
Affiliation:
Department of Electron Microscopy, Institute of Scientific Instruments ASCR, v.v.i., Brno, Czech Republic.

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 638 - 639
Copyright
© Microscopy Society of America 2018 

References

[1] Mullerova, I Frank, L Advances in Imaging and Electron Physics. 128 2003) p. 309.Google Scholar
[2] Konvalina, I. Mullerova, I. Nuclear Instr. & Methods in Phys. Res. Sec. A 645(1 2011) p. 55.Google Scholar
[3] The authors acknowledge funding from the Technology Agency of the Czech Republic (Competence center Electron microscopy, no: TE01020118) and from the People Programme (Marie Curie Actions) of the European Union's Seventh Framework Programme FP7/2007-2013/ under REA grant agreement no: 606988.Google Scholar