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Resolution Issues in Scanned Probe Microscopy

Published online by Cambridge University Press:  02 July 2020

P. E. Russell*
Affiliation:
Analytical Instrumentation Facility and Materials Science and Engineering Department, North Carolina State University, Raleigh, NC, 27695-7531
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Extract

Scanned Probe Microscopy first received widespread recognition in the form of scanning tunneling microscopy (STM) images clearly showing atomic resolution of the Si 111 surface in the characteristic 7×7 surface reconstruction. For this sample, STM imaging under carefully controlled ultrahigh vacuum conditions reveals the clear image of each atom position within the surface unit cell with excellent contrast and clearly atomic resolution. Over the past few years, versions of scanning force microscopy (commonly referred to as atomic force microscopy or AFM) have become much more widespread than STM. A very common, and very difficult question, is: What is the resolution of AFM? The simple answer is that SPM in general, and STM and AFM in particular, routinely obtain sub-angstrom resolution—in the z axis, or the sample height direction. This high resolution capability is easily demonstrated by scanning a cleaved crystal of known lattice spacing and observing single and multiple atomic steps.

Type
The Limits of Image Resolution: Seeing Is Believing
Copyright
Copyright © Microscopy Society of America 1997

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