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Resolution Assessment of an Aberration Corrected 1.2-MV Field Emission Transmission Electron Microscope

Published online by Cambridge University Press:  23 September 2015

Yoshio Takahashi ,
Tetsuya Akashi ,
Tomokazu Shimakura ,
Toshiaki Tanigaki ,
Takeshi Kawasaki ,
Hiroyuki Shinada  and
Nobuyuki Osakabe
Yoshio Takahashi
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Tetsuya Akashi
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Tomokazu Shimakura
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Toshiaki Tanigaki
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Takeshi Kawasaki
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Hiroyuki Shinada
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Nobuyuki Osakabe
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1865 - 1866
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

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[2] Dunin-Borkowski, R. E., et al., Microsc. Microanal. 18 (2012) 1708.Google Scholar
[3] Petford-Long, A. K., et al, Proceedings of EMC (2012). PS.1.1.Google Scholar
[4] Akashi, T., et al., Appl. Phys. Lett. 87 (2005) 174101.CrossRefGoogle Scholar
[5] This research was supported by a grant from the Japan Society for the Promotion of Science (JSPS) through the "Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program)" initiated by the Council for Science and Technology Policy (CSTP). We thank Dr. M. Haider, Dr. H. Miillar, and CEOS GmbH for developing the Cs-corrector..Google Scholar