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REM Studies of Surface Dynamics on Si Surfaces

Published online by Cambridge University Press:  02 July 2020

K. Yagi ,
K. Aoki ,
H. Minoda ,
Y. Tanishiro ,
H. Tamura  and
T. Suzuki
K. Yagi
Affiliation:
Physics Department, Tokyo Institute of Technology, Oh-okayama, Tokyo152
K. Aoki
Affiliation:
Physics Department, Tokyo Institute of Technology, Oh-okayama, Tokyo152
H. Minoda
Affiliation:
Physics Department, Tokyo Institute of Technology, Oh-okayama, Tokyo152
Y. Tanishiro
Affiliation:
Physics Department, Tokyo Institute of Technology, Oh-okayama, Tokyo152
H. Tamura
Affiliation:
Physics Department, Tokyo Institute of Technology, Oh-okayama, Tokyo152
T. Suzuki
Affiliation:
Physics Department, Tokyo Institute of Technology, Oh-okayama, Tokyo152
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Extract

Recent developments in techniques of real space observations of surfaces are notable. In them reflection electron microscopy (REM) is a unique technique where in-situ real time observations of wide areas of surfaces are possible. In the present paper recent studies of surface dynamic processes on Si surfaces are reviewed. Observed dynamic processes are adsorption induced successive phase transitions, adsorbate induced facet formations and step rearrangements induced by a reversal of specimen heating current direction(so called current effect) and by a reversal of the sign of the surface strain(strain effects).

Figure 1 reproduces a series of REM images and RHEED patterns taken during successive phase transition induced by Au deposition on a clean Si(lll) surface at 780°C[l]. (a) shows a REM image taken before Au deposition. Line images with zigzag in shape are atomic steps on the surface. The surface steps up to the right as indicated by a step mark. The corresponding RHEED pattern in (b) shows that the surface has the 7×7 structure.

Type
In Situ Studies in Microscopy
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 579 - 580
Copyright
Copyright © Microscopy Society of America 1997

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References

[1] S. Ino: in Reflection High-Energy Electron Diffraction and Reflection Electron Imaging of Surfaces(Eds. Larsen, P.K. et a, Plenum Press, New York 1988) p3.CrossRefGoogle Scholar

[2] Tanishiro, Y., Yagi, K. and Takayanagi, K. : Surface Sci. 243(12990) 37.Google Scholar