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Reduction of Electron Scattering Image Blur for Atmospheric Scanning Electron Microscopy

Published online by Cambridge University Press:  23 September 2015

Yusuke Ominami ,
Kenji Nakahira ,
Shinsuke Kawanishi  and
Sukehiro Ito
Yusuke Ominami
Affiliation:
Hitachi High-Technologies Corporation, 882, Ichige, Hitachinka-shi, Ibaraki-ken, 312-8504, Japan
Kenji Nakahira
Affiliation:
Hitachi Ltd. Yokohama Research Laboratory, 292 Yokohama-shi, Kanagawa, 244-0817, Japan
Shinsuke Kawanishi
Affiliation:
Hitachi High-Technologies Corporation, 882, Ichige, Hitachinka-shi, Ibaraki-ken, 312-8504, Japan
Sukehiro Ito
Affiliation:
Hitachi High-Technologies Corporation, 882, Ichige, Hitachinka-shi, Ibaraki-ken, 312-8504, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 241 - 242
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Ominami, Y., et al.., accepted in Microscopy (2014).Google Scholar
[2] Nguyen, K., Holtz, M. & Muller, D., Microsc. Microanal. 19(Suppl 2) (2013.Google Scholar