Hostname: page-component-586b7cd67f-2brh9 Total loading time: 0 Render date: 2024-11-25T01:52:54.279Z Has data issue: false hasContentIssue false
  • English
  • Français

Reduce Charging Effects on Beam Sensitive Material by Optimized Scanning Routines in SEM

Published online by Cambridge University Press:  05 August 2019

Maximilian Schmid ,
Andreas Liebel ,
Friederike Michael ,
Grigore Moldovan  and
Heike Soltau
Maximilian Schmid*
Affiliation:
PNDetector GmbH, Otto-Hahn-Ring 6, 81739 München, Germany
Andreas Liebel
Affiliation:
PNDetector GmbH, Otto-Hahn-Ring 6, 81739 München, Germany
Friederike Michael
Affiliation:
PNDetector GmbH, Otto-Hahn-Ring 6, 81739 München, Germany
Grigore Moldovan
Affiliation:
point electronic GmbH, Erich-Neuß-Weg 15, 06120 Halle (Saale), Germany)
Heike Soltau
Affiliation:
PNDetector GmbH, Otto-Hahn-Ring 6, 81739 München, Germany
*
*Corresponding author: [email protected]

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Low Voltage, Low Energy Electron Microscopy Imaging and Analysis
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 474 - 475
Copyright
Copyright © Microscopy Society of America 2019