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Re-crystallisation of Amorphous Silicon in the Production of Low Defect Density Silicon on Sapphire Thin Films

Published online by Cambridge University Press:  01 August 2005

W R McKenzie ,
H Domyo ,
T Ho  and
P R Munroe
W R McKenzie
Affiliation:
University of New South Wales, Australia
H Domyo
Affiliation:
Peregrine Semiconductor Australia Pty Ltd., Australia
T Ho
Affiliation:
Peregrine Semiconductor Australia Pty Ltd., Australia
P R Munroe
Affiliation:
University of New South Wales, Australia

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 2088 - 2089
Copyright
© 2005 Microscopy Society of America