Hostname: page-component-cd9895bd7-dk4vv Total loading time: 0 Render date: 2024-12-18T07:04:49.574Z Has data issue: false hasContentIssue false
  • English
  • Français

Recent development of an UHR and ULV FE-SEM with various signal detection capabilities and its applications

Published online by Cambridge University Press:  06 August 2003

Muto Atsushi ,
Kawamata Shigeru ,
Tamochi Ryuichiro ,
White Sara ,
Nakagawa Mine  and
Sato Mitsugu
Muto Atsushi
Affiliation:
Hitachi Science Systems, Ltd., 11-1, Ishikawa cho, Hitachinaka, 312-0057 Japan
Kawamata Shigeru
Affiliation:
Hitachi Science Systems, Ltd., 11-1, Ishikawa cho, Hitachinaka, 312-0057 Japan
Tamochi Ryuichiro
Affiliation:
Hitachi Science Systems, Ltd., 11-1, Ishikawa cho, Hitachinaka, 312-0057 Japan
White Sara
Affiliation:
Hitachi High-Technologies America, 944 Clopper Road, Gaithersburg, MD 20878-1301, USA
Nakagawa Mine
Affiliation:
Hitachi Science Systems, Ltd., 11-1, Ishikawa cho, Hitachinaka, 312-0057 Japan
Sato Mitsugu
Affiliation:
Hitachi High-Technologies Corp., 882Ichige, Hitachinaka, Ibaraki, 312-8504 Japan

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 146 - 147
Copyright
Copyright © Microscopy Society of America 2003