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A Readily-automated Scheme for Estimating the Critical Dose of Beam-Sensitive Materials

Published online by Cambridge University Press:  22 July 2022

Robert Colby*
Affiliation:
Corporate Strategic Research, ExxonMobil Research and Engineering Company, Annandale, NJ

Abstract

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Type
On Demand - Electron Microscopy of Beam Sensitive Samples: The Trials and Tribulations of Electron-Beam Sample Interactions
Copyright
Copyright © Microscopy Society of America 2022

References

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