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Quantitative measurement of Indium atom distribution inside InGaN QWs with atomic sensitivity

Published online by Cambridge University Press:  22 July 2003

Joerg R. Jinschek
Affiliation:
National Center for Electron Microscopy (NCEM), Lawrence Berkeley National Lab. (LBNL), One Cyclotron Road MS72-150, Berkeley, CA 94720, U.S.A
Christian Kisielowski
Affiliation:
National Center for Electron Microscopy (NCEM), Lawrence Berkeley National Lab. (LBNL), One Cyclotron Road MS72-150, Berkeley, CA 94720, U.S.A

Abstract

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Abstract
Copyright
Copyright © Microscopy Society of America 2003