Hostname: page-component-cd9895bd7-gxg78 Total loading time: 0 Render date: 2024-12-26T08:50:09.441Z Has data issue: false hasContentIssue false
  • English
  • Français

Quantitative Measurement of Electric Fields in Microelectronics Devices by In-Situ Pixelated STEM

Published online by Cambridge University Press:  22 July 2022

Victor Boureau ,
Lucas Bruas ,
Matthew Bryan ,
Jean-Luc Rouvière  and
David Cooper
Victor Boureau
Affiliation:
Interdisciplinary Center for Electron Microscopy, EPFL, Lausanne, Switzerland
Lucas Bruas
Affiliation:
Univ. Grenoble Alpes, CEA, Leti, Grenoble, France
Matthew Bryan
Affiliation:
Univ. Grenoble Alpes, CEA, Leti, Grenoble, France
Jean-Luc Rouvière
Affiliation:
Univ. Grenoble Alpes, CEA, IRIG-MEM, Grenoble, France
David Cooper*
Affiliation:
Univ. Grenoble Alpes, CEA, Leti, Grenoble, France
*
*Corresponding author: [email protected]

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Developments of 4D-STEM Imaging - Enabling New Materials Applications
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 480 - 482
Check for updates
Copyright
Copyright © Microscopy Society of America 2022

References

Cooper, D, Journal of Physics D 49, 474001 (2016).CrossRefGoogle Scholar
Ophus, C, Microscopy and Microanalysis 25, 563–582 (2019).CrossRefGoogle Scholar
Haas, B et al. , Ultramicroscopy 198, 58–72 (2019).CrossRefGoogle Scholar
Boureau, V et al. , Journal of Physics D 54, 085001 (2020).CrossRefGoogle Scholar
Clark, L et al. , Physical Review A 97, 043843 (2018).CrossRefGoogle Scholar
Bruas, L et al. , Journal of Applied Physics 127, 205703 (2020).CrossRefGoogle Scholar