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Quantitative Film Thickness Measurement Using Scintillator/Photomultiplier Backscattered Electron Detectors. Possible or Not?

Published online by Cambridge University Press:  01 August 2005

P Hovington ,
M Lagacé  and
P Noël
P Hovington
Affiliation:
Hydro-Quebec Research Institute, Canada
M Lagacé
Affiliation:
Hydro-Quebec Research Institute, Canada
P Noël
Affiliation:
Hydro-Quebec Research Institute, Canada

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 772 - 773
Copyright
© 2005 Microscopy Society of America