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Quantitative Composition Maps of Magnetic Recording Media by EFTEM

Published online by Cambridge University Press:  02 July 2020

J. Bentley ,
J.E. Wittig  and
T.P. Nolan
J. Bentley
Affiliation:
Metals & Ceramics Division, Oak Ridge National Laboratory, PO Box 2008, Oak Ridge, TN37831-6376
J.E. Wittig
Affiliation:
Vanderbilt University, Nashville, TN37235
T.P. Nolan
Affiliation:
Komag Inc., 1704 Automation Parkway, San Jose, CA95131
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Extract

Elemental mapping of Co-Cr-X based magnetic recording media at resolutions approaching 1 nm by energy-filtered transmission electron microscopy (EFTEM) can provide quantitative measurements of intergranular Cr segregation for correlation with magnetic properties and materials processing. The thin-film media present many challenges for EFTEM methods, such as diffraction contrast and closelyspaced edges. The goal of this work was to provide robust methods for mapping quantitative compositions in such materials. Results presented here are for a model material of 60 nm of Co84Cr12Ta4 on a 75 nm Cr underlayer; both films were d.c. magnetron sputtered onto a NiP-plated Al substrate pre-heated to 250°C. Other compositions and thinner layers (∼30 nm) have also been studied. EFTEM was performed on back-thinned, plan-view specimens with a Gatan Imaging Filter (GIF) interfaced to a 300 kV LaB6 Philips CM30. Optimized acquisition conditions have been detailed elsewhere. Besides core-loss image series, zero-loss I0 (slit width Δ=10eV), low-loss Ik (Δ=30eV), and unfiltered IT images were recorded, and maps of t/λ. = ln(IT / I0), where t is specimen thickness and λ. is the total inelastic mean free path, were produced.

Type
Compositional Imaging and Spectroscopy
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 634 - 635
Copyright
Copyright © Microscopy Society of America

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References

1. Bentley, J.et al., these proceedings.Google Scholar

2. Bentley, J.et al., Mater. Res. Soc. Symp. Proc. 517 (1998) 205.CrossRefGoogle Scholar

3. Bentley, J., Microscopy and Microanalysis 4 suppl.2 (1998) 158 (and references therein).Google Scholar

4. Research at the ORNL SHaRE User Facility sponsored by the Division of Materials Sciences, U.S. Department of Energy, under contract DE-AC05-96OR22464 with Lockheed Martin Energy Research Corp., and through the SHaRE Program under contract DE-AC05-76OR00033 with Oak Ridge Associated Universities. Support from the Vanderbilt University Research Council and Komag Inc. is gratefully acknowledged.