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Quantitative Assessment of TEM-Sample Warping Caused by FIB Preparation

Published online by Cambridge University Press:  01 August 2010

R Salzer ,
A Graff ,
M Simon  and
F Altmann
R Salzer
Affiliation:
Fraunhofer Institute for Mechanics of Materials, Germany
A Graff
Affiliation:
Fraunhofer Institute for Mechanics of Materials, Germany
M Simon
Affiliation:
Fraunhofer Institute for Mechanics of Materials, Germany
F Altmann
Affiliation:
Fraunhofer Institute for Mechanics of Materials, Germany

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 172 - 173
Copyright
Copyright © Microscopy Society of America 2010