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Quantitative Annular Dark Field Images of Silicon (001) Crystal

Published online by Cambridge University Press:  08 April 2017

Y Oshima ,
S Kim ,
Y Tanishiro  and
K Takayanagi
Y Oshima
Affiliation:
Osaka University, Japan
S Kim
Affiliation:
Tokyo Institute of Technology, Japan
Y Tanishiro
Affiliation:
Tokyo Institute of Technology, Japan
K Takayanagi
Affiliation:
Tokyo Institute of Technology, Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 1294 - 1295
Copyright
Copyright © Microscopy Society of America 2011