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Quantification of STEM-EDS With Ion Implantation

Published online by Cambridge University Press:  25 July 2016

R. Garcia ,
Y. Liu  and
F. A. Stevie
R. Garcia
Affiliation:
Analytical Instrumentation Facility, North Carolina State University, Raleigh, NC 27695, USA
Y. Liu
Affiliation:
Analytical Instrumentation Facility, North Carolina State University, Raleigh, NC 27695, USA
F. A. Stevie
Affiliation:
Analytical Instrumentation Facility, North Carolina State University, Raleigh, NC 27695, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 138 - 139
Copyright
© Microscopy Society of America 2016 

References

References:

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[3] Vartuli, C. B., et al, Microscopy and Microanalysis Proceedings (2002) 8(Suppl. 2) p. 1192CD.CrossRefGoogle Scholar
[4] Giannuzzi, L. A., et al, in Introduction to Focused Ion Beams (eds. L. A. Giannuzzi & F. A. Stevie, (Springer, New York) (2005). p. 201.CrossRefGoogle Scholar
[5] Wilson, R. G., Stevie, F. A. & Magee, C. W. Secondary Ion Mass Spectrometry. Wiley, New York (1989). Section 3.1.Google Scholar
[6] Stevie, F. A. Secondary Ion Mass Spectrometry. Momentum Press, New York (2016). Chapter 6.Google Scholar