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Quantification of Composition of Epitaxial Si/SiGe by EELS

Published online by Cambridge University Press:  01 August 2018

Michael A. Gribelyuk ,
Wayne Zhao  and
Bianzhu Fu
Michael A. Gribelyuk
Affiliation:
ATD Characterization, GLOBALFOUNDRJES, Malta, NY
Wayne Zhao
Affiliation:
CCA Characterization, GLOBALFOUNDRIES, Malta, NY
Bianzhu Fu
Affiliation:
CCA Characterization, GLOBALFOUNDRIES, Malta, NY Currently at: Entegris Inc., Danbury, CT

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 472 - 473
Copyright
© Microscopy Society of America 2018 

References

[1] Fu, B., et al, Microsc. Microanal. 22(S3 2016) p. 1618.Google Scholar
[2] Mitchell, D.R.G. www.dmscripting.com v2.1 Sept 2012, Mean Free Path Estimator, plugin for Digital Micrograph Software.Google Scholar
[3] The authors acknowledge Michael Hollner, Mark Hudson for preparation of TEM samples.Google Scholar