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A Proposal for Improved Helium Microscopy

Published online by Cambridge University Press:  11 April 2014

Frederick W. Martin
Frederick W. Martin*
Affiliation:
Nanobeam Corporation, 50 Village Avenue, Dedham, MA 02026, USA
*
*Corresponding author. [email protected]
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Abstract

Elimination of the electrostatic objective lens and alternative use of a Cc- and Cs-corrected quadrupole doublet may increase the useful working distance of the helium microscope, improve its resolution from 3 to 0.3 Å, and improve its optimum convergence angle from 0.4 to 4 mrad.

Keywords

helium microscopefocused ion beamCs correctionCc correctionobjective lens
Type
Instrumentation and Techniques Development
Information
Microscopy and Microanalysis , Volume 20 , Issue 5 , October 2014 , pp. 1619 - 1622
Copyright
© Microscopy Society of America 2014 

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