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Progression of Focused Helium Ion Beam Milling in Gold Substrates

Published online by Cambridge University Press:  23 September 2015

E.M. Mutunga ,
S. Tan ,
A.E. Vladar  and
K.L. Klein
E.M. Mutunga
Affiliation:
University of Tennessee, Knoxville, TN 37996
S. Tan
Affiliation:
Intel Corporation, Santa Clara, CA 95054
A.E. Vladar
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
K.L. Klein*
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899 University of the District of Columbia, Washington, DC 20008
*
*Corresponding author: [email protected]

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1979 - 1980
Copyright
Copyright © Microscopy Society of America 2015 

References

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