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Published online by Cambridge University Press: 02 July 2020
All the lenses, deflectors and stigmators of contemporary electron microscopes are controlled digitally by an internal computer. Control through RS232 serial interface by an external computer has also become a standard feature. This external control has made so-called computer assisted electron microscopy (CAEM) possible and practical. We are developing a CAEM system with two objectives: (1) to free inexperienced microscopists from technical details of operating an electron microscope, especially transmission electron microscopes (TEM); (2) to assist experienced microscopists to operate their microscopes with higher accuracy and efficiency. The features include automated and/or assisted standard operations in focusing, stigmating, and aligning the microscope, and also sophisticated tuning that requires the evaluation of subtle changes in image features such as aligning the incident electron beam direction in the presence of 3-fold astigmatism in objective lens. CAEM can further assist operators in selecting areas or objects and taking images/diffraction/energy spectrum with all the parameters well controlled and catalogued together, thus not only enabling ease-of-use and high accuracy in operation but also yielding more information on the specimen.