This material is based upon work supported by the U.S. Department of Energy, Office of Science, National Quantum Information Science Research Centers, Superconducting Quantum Materials and Systems Center (SQMS) under the contract No. DE-AC02-07CH11359. This work made use of the EPIC facility of Northwestern University's NUANCE Center, which received support from the Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF ECCS-1542205); the MRSEC program (NSF DMR-1720139) at the Materials Research Center; the International Institute for Nanotechnology (IIN); the Keck Foundation; and the State of Illinois, through the IIN. S. M. R. gratefully acknowledges support from the IIN and 3M. The authors thank Dr. Anahita Pakzad from Ametek/Gatan, Inc, Pleasanton, CA, for the valuable feedback on the usage of Stela pixelated detector.
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