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Probing and Analyzing Buried Interfaces of Multifunctional Oxides Using a Secondary Electron Energy Analyzer

Published online by Cambridge University Press:  17 July 2014

Avinash Srinivasan Open the ORCID record for Avinash Srinivasan [Opens in a new window]  and
Anjam Khursheed
Avinash Srinivasan*
Affiliation:
Department of Electrical and Computer Engineering, Centre for Integrated Circuit Failure Analysis and Reliability (CICFAR), National University of Singapore, Singapore 117581
Anjam Khursheed
Affiliation:
Department of Electrical and Computer Engineering, Centre for Integrated Circuit Failure Analysis and Reliability (CICFAR), National University of Singapore, Singapore 117581
*
*Corresponding author. E-mail: [email protected]
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Abstract

A contactless method of probing and analyzing multifunctional oxide interfaces using an electron energy analyzer inside a scanning electron microscope is presented. High contrast experimental secondary electron analyzer signals are used to detect changes in the interface conductivity of a LaAlO3/SrTiO3 sample. Monte Carlo simulations of the primary beam/specimen interaction are carried out and correlated with the experimental results in order to help understand the role of the primary beam energy and adjust it to enhance contrast.

Keywords

toroidal electron energy analyzerscanning electron microscopesecondary electron signal contrastmultifunctional oxideLaAlO3/SrTiO3contactless method
Type
Materials Applications
Information
Microscopy and Microanalysis , Volume 20 , Issue 5 , October 2014 , pp. 1494 - 1498
Copyright
© Microscopy Society of America 2014 

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