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’A Priori’ synthesis of electron energy-loss spectra for detection limit quantification

Published online by Cambridge University Press:  02 July 2020

N K Menon ,
O L Krivanek  and
J A Hunt
N K Menon
Affiliation:
Gatan R&D, 5933 Coronado Lane, Pleasanton, CA94588
O L Krivanek
Affiliation:
Nion Co., 1102 8th St. Kirkland, WA, 98033
J A Hunt
Affiliation:
Gatan R&D, 5933 Coronado Lane, Pleasanton, CA94588
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Abstract

A software package has been developed that synthesizes entire energy-loss spectra for an arbitrary distribution of impurities embedded in an arbitrary matrix, for user specified sample parameters and acquisition conditions. The simulation of a complete spectrum facilitates the estimation of quantities such as the Minimum Detectable Mass (MDM) or the Minimum Detectable Number of atoms (MDN). This is addressed with particular attention to optimising the acquisition conditions to maximize the detectability and also to estimating the error in a typical EELS quantification. It is envisaged that this approach will have wide-ranging implications for the role of EELS in quantitative microanalysis.

Electron Energy Loss Spectroscopy (EELS) is widely recognized as a microanalytical tool capable of characterizing the elemental composition of materials with nm-level resolution and sensitivity approaching single atoms. Extracting quantitative information from EEL spectra is complicated by the fact that both the cross-sections and the pre-edge background used for inner-shell analysis vary widely.

Type
EELS Microanalysis at High Sensitivity: Advances in Spectrum Imaging, Energy Filtering and Detection (Organized by R. Leapman and J. Bruley)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 1144 - 1145
Copyright
Copyright © Microscopy Society of America 2001

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References

References:

1.Ritchie, R H and Howie, AElectron excitation and the optical potential in electron microscopy. Phil Mag 36(1977):463CrossRefGoogle Scholar
2.Menon, N K and Krivanek., O L ( submitted to Microscopy and Microanalysis)Google Scholar
3.Rez, PCross-sections for energy-loss spectroscopy. Ultramicroscopy 9 (1982):283CrossRefGoogle Scholar