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Plasma Cleaning with Alternate Gases

Published online by Cambridge University Press:  30 July 2020

Ronald Vane ,
Ewa Kosmowska  and
Michael Cable
Ronald Vane
Affiliation:
XEI Scientific, Inc., Redwood City, California, United States
Ewa Kosmowska
Affiliation:
XEI Scientific, Inc., Redwood City, California, United States
Michael Cable
Affiliation:
XEI Scientific, Inc., Redwood City, California, United States

Abstract

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Type
Vendor Symposium
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 2704 - 2706
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Copyright
Copyright © Microscopy Society of America 2020

References

US Patent 6,452,315 R. Vane (2002)Google Scholar
US Patent 10,468,236 R. Vane (2019)Google Scholar
Kosmowska, E. et al. , Microsc. Microanal. 23 (S1) (2017), 74.10.1017/S1431927617001052CrossRefGoogle Scholar
Vane, R. et al. Microsc. Microanal. 20 (S3) (2014), 1130.10.1017/S1431927614007387CrossRefGoogle Scholar
Vane, R. and Kosmowska, E., Microsc. Microanal. 22 (S3) (2016), 46.10.1017/S1431927616001082CrossRefGoogle Scholar