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A Plasma Anti-Contaminator for Imbedded Applications in SEMs and FIBs

Published online by Cambridge University Press:  01 August 2003

Ronald Vane  and
Vincent Carlino
Ronald Vane
Affiliation:
XEI Scientific, 3124 Wessex Way, Redwood City, CA 94061
Vincent Carlino
Affiliation:
XEI Scientific, 3124 Wessex Way, Redwood City, CA 94061

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 1270 - 1271
Copyright
Copyright © Microscopy Society of America 2003