Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-11-28T11:23:23.344Z Has data issue: false hasContentIssue false
  • English
  • Français

A Plan-view TEM Specimen Preparation Method Using Focused Ion Beam

Published online by Cambridge University Press:  04 August 2017

Lan-Hsuan Lee ,
Chia-Hao Yu ,
Yu-Ting Hong  and
Cheng-Yen Wen
Lan-Hsuan Lee
Affiliation:
Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan.
Chia-Hao Yu
Affiliation:
Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan.
Yu-Ting Hong
Affiliation:
Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan.
Cheng-Yen Wen
Affiliation:
Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan.

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 266 - 267
Copyright
© Microscopy Society of America 2017 

References

[1] Mayer, J, et al, MRS Bull. 32 2007). p. 400.CrossRefGoogle Scholar
[2] Langford, R M, et al, J. Vac. Sci. Technol., B 19 2001). p. 755.Google Scholar
[3] Floresca, H C, et al, Microsc. Microanal. 15 2009). p. 558.CrossRefGoogle Scholar
[4] Kim, J S, et al, Appl. Microsc. 45 2015). p. 195.Google Scholar
[5] O'Shea, K J, et al, Micron 66 2014). p. 9.CrossRefGoogle Scholar
[6] Jublot, M & Texier, M Micron 56 2014). p. 63.Google Scholar
[7] The authors acknowledge funding from the Ministry of Science and Technology of Taiwan, Grant No. MOST 103-2112-M-002-015-MY3..Google Scholar