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Photon-Correlation Cathodoluminescence Spectroscopy in a SEM: A Tool to Analyze the Performance of Optoelectronics Devices

Published online by Cambridge University Press:  22 July 2022

Sylvain Finot ,
Corentin Le Maoult ,
Etienne Gheeraert ,
David Vaufrey  and
Gwénolé Jacopin
Sylvain Finot
Affiliation:
Univ. Grenoble Alpes, CNRS, Grenoble INP, Institut Néel, Grenoble, France
Corentin Le Maoult
Affiliation:
Univ. Grenoble Alpes, CEA, LETI, Grenoble, France
Etienne Gheeraert
Affiliation:
Univ. Grenoble Alpes, CNRS, Grenoble INP, Institut Néel, Grenoble, France
David Vaufrey
Affiliation:
Univ. Grenoble Alpes, CEA, LETI, Grenoble, France
Gwénolé Jacopin*
Affiliation:
Univ. Grenoble Alpes, CNRS, Grenoble INP, Institut Néel, Grenoble, France
*
*Corresponding author: [email protected]

Abstract

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Type
Nanoscale Optics with Electrons and Photons
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 2012 - 2013
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Copyright
Copyright © Microscopy Society of America 2022

References

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This work was supported by the French National Research Agency through the grants No. ANR-15-IDEX-02 and ANR-21-CE42-0020-01Google Scholar