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Performance of Low-kV Aberration-corrected STEM with Delta-corrector and CFEG in Ultrahigh Vacuum Environment

Published online by Cambridge University Press:  04 August 2017

Takeo Sasaki ,
Shigeyuki Morishita ,
Yuji Kohno ,
Masaki Mukai ,
Koji Kimoto  and
Kazu Suenaga
Takeo Sasaki
Affiliation:
EM Business unit, JEOL Ltd., Tokyo 196-8558, Japan
Shigeyuki Morishita
Affiliation:
EM Business unit, JEOL Ltd., Tokyo 196-8558, Japan
Yuji Kohno
Affiliation:
EM Business unit, JEOL Ltd., Tokyo 196-8558, Japan
Masaki Mukai
Affiliation:
EM Business unit, JEOL Ltd., Tokyo 196-8558, Japan
Koji Kimoto
Affiliation:
Research Center for Advanced Measurement and Characterization , National Institute for Materials Science (NIMS), Ibaraki 305-0044, Japan
Kazu Suenaga
Affiliation:
■

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 468 - 469
Copyright
© Microscopy Society of America 2017 

References

[1] Sasaki, T., et al, J. Electron Microscopy 59 2010). p. S7.CrossRefGoogle Scholar
[2] Morishita, S., et al, Phys. Rev. Lett. 117 2016). p. 153004.CrossRefGoogle Scholar