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PENEPMA: A Monte Carlo Program for the Simulation of X-Ray Emission in Electron Probe Microanalysis

Published online by Cambridge University Press:  15 May 2017

Xavier Llovet Open the ORCID record for Xavier Llovet [Opens in a new window]  and
Francesc Salvat
Xavier Llovet*
Affiliation:
Centres Científics i Tecnològics, Universitat de Barcelona, Llus Solé i Sabars 1-3, 08028 Barcelona, Spain
Francesc Salvat
Affiliation:
Facultat de Física (FQA and ICC), Universitat de Barcelona, Diagonal 647, 08028 Barcelona, Spain
*
*Corresponding author. [email protected]
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Abstract

The Monte Carlo program PENEPMA performs simulations of X-ray emission from samples bombarded with both electron and photon beams. It is based on the general-purpose Monte Carlo simulation package PENELOPE, an elaborate system for the simulation of coupled electron-photon transport in arbitrary materials, and on the geometry subroutine package PENGEOM, which tracks particles through complex material structures defined by quadric surfaces. After a brief description of the interaction models implemented in the simulation subroutines and of the structure and operation of PENEPMA, we provide an overview of the capabilities of the program along with several examples of its application to the modeling of electron probe microanalysis measurements.

Keywords

Monte Carlo simulationelectron probe microanalysisPENELOPEX-ray spectra
Type
Instrumentation and Software
Information
Microscopy and Microanalysis , Volume 23 , Issue 3 , June 2017 , pp. 634 - 646
Copyright
© Microscopy Society of America 2017 

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