Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-11-28T14:01:57.420Z Has data issue: false hasContentIssue false
  • English
  • Français

PEC Reliability in 3D E-beam DOE Nanopatterning.

Published online by Cambridge University Press:  28 September 2015

Stanislav Krátký ,
Michal Urbánek  and
Vladimir Kolařík
Stanislav Krátký
Affiliation:
Institute of Scientific Instruments of the AS CR, v. v. i., Brno, Czech Republic
Michal Urbánek
Affiliation:
Institute of Scientific Instruments of the AS CR, v. v. i., Brno, Czech Republic
Vladimir Kolařík
Affiliation:
Institute of Scientific Instruments of the AS CR, v. v. i., Brno, Czech Republic

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Numerical Methods
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 230 - 235
Copyright
Copyright © Microscopy Society of America 2015 

References

[1]O'Shea, DC, et al in Diffractive Optics: Design, Fabrication, and Test. (SPIE, Washington) p. 1.Google Scholar
[2]Cui, Z in Nanofabrication Principles, Capabilities and Limits. Springer, New York) p. 1.Google Scholar
[3]Loewen, EG, et al in Diffraction Gratings and Applications. Marcel Dekker, New York) p. 495.Google Scholar
[4]McCord, MA & Rooks, MJ in Handbook of Microlithography, Micromachinning, and Microfabrication, Vol. 1: Microlithography, P Rai-Choudhury, (SPIE, Washington) p. 139.Google Scholar
[5]Hauptmann, M, et al, Microelectron. Eng. 86 (2009). p. 539.CrossRefGoogle Scholar
[6]Babin, S, et al, Microelectron Eng. 57–58 (2001). p. 343.CrossRefGoogle Scholar
[7]Harafuji, L, et al, J. Vac. Sci.Technol. B 10 (1992). p. 133.CrossRefGoogle Scholar
[8]Seo, E, et al, Microelectron. Eng. 50 (2000). p. 305.CrossRefGoogle Scholar
[9]Unal, N, et al, Microelectron Eng. 87 (2010). p. 940.CrossRefGoogle Scholar
[10] The authors acknowledge funding from MEYS CR (project No. LO1212), the TACR project No. TE 01020233 and by the institutional support RVO: 68081731.Google Scholar