Hostname: page-component-586b7cd67f-t8hqh Total loading time: 0 Render date: 2024-11-25T14:50:28.332Z Has data issue: false hasContentIssue false
  • English
  • Français

The Path to Quantitative 3D Metrology: FIB-SEM 3D Tomography in Data Storage Industry

Published online by Cambridge University Press:  01 August 2018

Zhi-Peng Li ,
Jianxin Fang  and
Haifeng Wang
Zhi-Peng Li
Affiliation:
Materials Science Lab, Western Digital Corporation, Fremont, USA
Jianxin Fang
Affiliation:
Materials Science Lab, Western Digital Corporation, Fremont, USA
Haifeng Wang
Affiliation:
Materials Science Lab, Western Digital Corporation, Fremont, USA

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 828 - 829
Copyright
© Microscopy Society of America 2018 

References

[1] Lepinay, K. Lorut, F. Microsc. Microanal. 19 2013) p. 85.Google Scholar
[2] Kotula, P. G., Keenan, M. R. Michael, J. R. Microsc. Microanal. 12 2006) p. 36.Google Scholar
[3] Mobus, G., Doole, R. C. Inkson, B. J. Ultramicroscopy 96 2003) p. 433.Google Scholar