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A Path to EUV Photoresist Reference Metrology Using Restricted Tilt Electron Tomography

Published online by Cambridge University Press:  30 July 2020

Andrew Barnum ,
Mark Biedrzycki  and
Alain Moussa
Andrew Barnum
Affiliation:
Thermo Fisher Scientific, Hillsboro, Oregon, United States
Mark Biedrzycki
Affiliation:
Thermo Fisher Scientific, Hillsboro, Oregon, United States
Alain Moussa
Affiliation:
imec, Leuven, Vlaams-Brabant, Belgium

Abstract

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Type
Vendor Symposium - Materials Preparation
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1990 - 1991
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Copyright
Copyright © Microscopy Society of America 2020

References

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