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Overview of the Metrological Scanning Probe Microscopes at PTB

Published online by Cambridge University Press:  30 December 2005

H. U. Danzebrink ,
G. Dai ,
F. Pohlenz  and
G. Wilkening
H. U. Danzebrink
Affiliation:
Physikalisch-Technische Bundesanstalt, Germany
G. Dai
Affiliation:
Physikalisch-Technische Bundesanstalt, Germany
F. Pohlenz
Affiliation:
Physikalisch-Technische Bundesanstalt, Germany
G. Wilkening
Affiliation:
Physikalisch-Technische Bundesanstalt, Germany
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Extract

Quantitative dimensional measurements of micro- and nanometre-sized structures are urgently required from science and industry. Due to their very high vertical resolution (down to sub nanometres) and high lateral resolution (<10 nm) scanning probe microscopes (SPMs) are of great interest for such metrological applications. Additionally, SPM methods are able to measure surfaces in a number of modes like contact, intermittent-contact and non-contact mode. The forces between tip and sample are low during the measurement and, even in contact mode, reach only a few nanonewtons. This fact prevents scratching of the measured surface during the SPM scanning procedure even when very sharp tips are used.

Type
Other
Information
Microscopy and Microanalysis , Volume 11 , Issue S03 , December 2005 , pp. 2 - 5
Copyright
© 2005 Microscopy Society of America

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