Article contents
Optimization of the Shapes of Electrodes of Electrostatic Lenses
Published online by Cambridge University Press: 28 September 2015
Abstract
We explore the benefits of using novel electrode shapes in electrostatic lenses. Two representative types of lenses are considered and significant improvements are obtained in their spherical aberrations.
- Type
- Numerical Methods
- Information
- Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 276 - 279
- Copyright
- Copyright © Microscopy Society of America 2015
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