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Optical Modulator P/N Junction Mapping by Electron Holography and Scanning Capacitance Microscopy

Published online by Cambridge University Press:  01 August 2018

Y. Y. Wang ,
J. Nxumalo ,
J. Jeon ,
K. Barton  and
K. Nummy
Y. Y. Wang
Affiliation:
GlobalFoundires Inc., Hopewell Junction, NY, USA
J. Nxumalo
Affiliation:
GlobalFoundires Inc., Hopewell Junction, NY, USA
J. Jeon
Affiliation:
GlobalFoundires Inc., Hopewell Junction, NY, USA
K. Barton
Affiliation:
GlobalFoundires Inc., Hopewell Junction, NY, USA
K. Nummy
Affiliation:
GlobalFoundires Inc., Hopewell Junction, NY, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 1464 - 1465
Copyright
© Microscopy Society of America 2018 

References

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[3] Wang, Y. Y., et al, Ultramicroscopy 124 2013) p. 117.Google Scholar
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[7] We would like to thank GlobalFoundries managers, E. Crawford and A. Katnani, for their support of this work.Google Scholar