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Operating Conditions For Quantitative X-Ray Analysis In The Environmental SEM

Published online by Cambridge University Press:  02 July 2020

R. A. Carlton ,
C. E. Lyman  and
J. E. Roberts
R. A. Carlton
Affiliation:
Pharmaceutical Research and Development, Rhone-Poulenc Rorer, Collegeville, PA, 19426
C. E. Lyman
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, PA, 18015
J. E. Roberts
Affiliation:
Department of Chemistry, Lehigh University, Bethlehem, PA, 18015
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Extract

Standard Reference Material (SRM) 482 of the National Institute of Standards and Technology is a set of 6 gold/copper wires, ranging in concentration from 0 to 100% Cu in 20% steps, intended for calibration studies of electron beam microanalyzers. This is an appropriate standard to test the accuracy of energy dispersive x-ray spectrometry (EDS) in the Environmental Scanning Electron Microscope (ESEM). While the presence of the gas in the sample chamber gives the ESEM its unique capabilities, it also is the source of complications to x-ray spectrometry. The gas can spread the primary electron beam into a wide skirt of electrons with the consequent production of x-rays many micrometers from the target location of the beam. In spite of the difficulties, at least two methods have been proposed to correct high pressure data to that expected at low pressures.

Type
New Trends in Scanning Electron Microscopy and Microanalysis
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 294 - 295
Copyright
Copyright © Microscopy Society of America

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References

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