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On-line Scanned Probe Microscopy Transparently Integrated with Dual Beam SEM/FIB Systems

Published online by Cambridge University Press:  23 November 2012

A. Ignatov ,
A. Komissar  and
R. Geurts
A. Ignatov
Affiliation:
19 Hartum Street, Nanonics Imaging Ltd., Jerusalem, Select State, Israel
A. Komissar
Affiliation:
19 Hartum Street, Nanonics Imaging Ltd., Jerusalem, Select State, Israel
R. Geurts
Affiliation:
FEI Company, Eindhoven, Netherlands
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 640 - 641
Copyright
Copyright © Microscopy Society of America 2012

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